Supply gas quality flow controller s-300 production

Introduction

high performanceMFCTailored for the semiconductor industry

S300Series digital quality flow controller/Flow meter: Adopting the company's independently developed industrial grade excellent flow sensor, combined with fine polished gas path structure and high-precision digital control circuit and algorithm, it achieves high-precision, low zero drift, and high repeatability control. This product is equipped with an on-site display screen and address coding switch, with multiple communication methods to choose from. It can be customized with full metal sealing and is suitable for semiconductor, vacuum coating, photovoltaic, and other various application environments.

main advantages

S1Rich physical function modules

The top configuration has rich functional modules:

* RJ45Digital communication interface(customizable

EtherCATorRS485agreement)

* Address code switch

* On site display screen

* status indicator light

In addition, the side configuration includesM8Aviation power supply interface, intuitive display, simple operation, convenient for users to conduct on-site flow monitoring and control.

S2quick response

1.5msSensor response time,0.1~0.5sInstrument system response time, timely capture of small flow changes.

S3high precision

2.0%-percentF.S.Maintain high precision across the entire range:

0.3%F.S.(≤30%F.S.)；1.0%S.P.(＞30%F.S.)

S4Equipped with a dedicated upper computer

Equipped with powerful functionsSmartflowThe upper computer software supports multi machine linkage, facilitating monitoring and equipment configuration.

S5certified product

passTüVinternational organizationCE&EMCCertification, orJLYFirst level calibration certificate, etc., in compliance with multiple requirementsSEMIStandard.

Product Specifications

* Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, temperature25℃、2.5bardifferential pressure(air intake3.5barAbsolute pressure on air outlet1bar

absolute pressure)Horizontal placement installation.

* It is recommended to install a straight pipe section of appropriate size at the inlet end, otherwise it may cause deviation in accuracy.

* It is recommended to match the inlet and outlet ends with joints that are as large as possible to avoid additional pressure loss.

1 The range shown is an optional range for nitrogen gas.

2 %F.S.The percentage of error to full scale.

3 %S.P.Refers to the percentage of error to the set value.

4 Response time refers to reaching the set value ±2%The time required within.

5 Working pressure refers to the intake and exhaust ports(1barabsolute pressure)Please contact us for more details on the differential pressure between them.

Size and Communication