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Phone
4000066550
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Address
Address: Room 201, 12th Floor, Building B, International Innovation Park, Laoshan District, Qingdao City, Shandong Province
Qingdao Xinsheng Micro Nano Electronic Technology Co., Ltd
4000066550
Address: Room 201, 12th Floor, Building B, International Innovation Park, Laoshan District, Qingdao City, Shandong Province
The new generation of industrial grade flow sensor chips and excellent gas path structurecombine
Digital quality flow controller: using the company's independently developed industrial grade excellent flow sensor chip, combined with low-pressure loss gas path structure and high-precision digital control circuit and algorithm, to achieve high-precision, high stability, and wide range ratio control over a wide temperature range. This product is equipped with an on-site debugging screen and an independent power supply interface, suitable for various application environments such as semiconductors, vacuum coating, photovoltaics, and others.

Developed based on the theory proposed by scientist Thomas that the amount of heat absorbed or released by a gas is proportional to its mass flow rate. When there is no airflow, the temperature field centered around the heater is symmetrically distributed; When there is airflow, the temperature field distribution deviates, resulting in a temperature difference between upstream and downstream. By measuring this temperature difference, the mass flow rate of gas flowing through the chip surface can be calculated.

Qingdao Xinsheng MFC-S500 series gas mass flow controllerThe gas flow channel design with * can achieve flexible split ratio configuration, covering a range of 1sccm~120slm, with a minimum control accuracy of 0.1sccm, and a drift of only 0.4~0.6% in the temperature range of 0~50 ℃. In terms of electrical signals, we provide multiple digital and analog control methods, and are equipped with industrial grade display screens for easy on-site debugging and configuration by customers.
