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E-mail
447062079@qq.com
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Phone
13817415075
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Address
No. 16 Yezhang Road, Daye Highway, Fengxian District, Shanghai
Product Categories
Shanghai Haixiang Instrument Equipment Factory
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NegotiableUpdate on 01/18
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Overview
Suitable for processes such as non oxidative drying, curing, welding, annealing, etc. in semiconductors, oxygen free copper, optoelectronic components, energy raw materials, communication products, electromechanical products, etc.
Product Details
1、 Equipment usage
Suitable for non oxidative drying, curing, welding, annealing and other processing techniques in semiconductors, optoelectronic components, energy raw materials, communication products, electromechanical products, etc.
IITechnical Specifications
Parameters/Model |
HZF-100L |
HZF-150L |
HZF-250L |
HZF-500L |
Volume (L) |
100L |
150L |
250L |
500L |
Internal dimensions mm |
470*450*450 |
500*600*500 |
800*700*900 |
1000*1000*1000 |
External dimensions mm (approximately) |
940*720*1530 |
970*870*1580 |
1270*970*1980 |
1470*1270*2080 |
temperature range |
Room temperature+15~250 ℃ |
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temperature fluctuation |
±0.2℃ |
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electric heating tube |
Dust free electric heater 5KW x 1 set |
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真空度 |
100KPa~0.1KPa |
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Design ultimate vacuum |
0.2kPa |
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Vacuum leakage rate |
24-hour average leakage rate ≤ 800Pa |
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heating rate |
RT~150 ℃ for about 30 minutes |
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降温速率 |
150 ℃~60 ℃ for about 30 minutes |
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vacuum speed |
< 0.2KPa/5Min |
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Vacuum release |
<5-15 minutes (adjustable), the vacuum breaking gas can be switched (nitrogen and air: air with filter) |
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oxygen content |
腔体氧含量≤1000PPM |
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nitrogen flow rate |
Nitrogen flow rate 10-100L/Min float flow switch |
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partition |
two pieces |
three pieces |
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3、 Structural characteristics
(1) Adopting a vertical chamber design, the upper part is the working chamber, which has partitions and cooling pipes, a back blower motor, a vacuum pump in the lower cabinet, cooling pipes, and particulate matter filters installed in the lower electrical cabinet. The chamber is equipped with an exhaust port, an exhaust port, a nitrogen inlet, and an exhaust vacuum valve installed at the bottom back of the box;
(2) Box shell: Made of high-quality A3/1.5mm cold-rolled steel plate and 100 * 100 * 80mm channel steel welded together, with surface electrostatic spraying;
(3) Internal cavity: imported SUS304/thickness 3.0/5.0mm brushed stainless steel plate;
(4) Door opening mechanism: made by connecting channel steel and tempered glass (single door opening);
(5) Door sealing material: The tightness of the box door can be adjusted, and the overall molding of the Japanese imported silicone rubber door sealing ring ensures high vacuum inside the box;
(6) Temperature control: High precision microcomputer PLC program temperature controller, using PID and empirical fuzzy control technology, precise temperature control, arbitrary setting of working temperature, data recording and storage, USB data export function, fault alarm query function;
(7) Vacuum control: Automatic vacuum pumping is controlled through PLC relays, and delayed vacuum pumping and timed power on/off are achieved. The exhaust pipeline is equipped with an electromagnetic valve. The vacuum pump can be set to start at a fixed time, automatically extract air, stop at a fixed time, and record and store data;
protection system
Independent over temperature alarm cuts off heating power supply
earth leakage protection
Broken resistance wire alarm
Fan overheat protection
Vacuum pump overheat and overload protection
Water cooling flow protection
Nitrogen overpressure protection
phase sequence protector
Grounding and other protections